发明名称 |
Large area microwave plasma apparatus with adaptable applicator |
摘要 |
A microwave apparatus for sustaining a substantially uniform plasma over a relatively large area. The microwave apparatus comprises a vacuum vessel for sustaining the plasma in a plasma region thereof. The apparatus further comprises a nonevanescent microwave applicator having means for controlling the cutoff frequency thereof. The microwave applicator may comprise a waveguide and a volume of dielectric material disposed within the waveguide. Alternately, the microwave applicator may comprise ridge waveguide. |
申请公布号 |
AU9404598(A) |
申请公布日期 |
1999.04.23 |
申请号 |
AU19980094045 |
申请日期 |
1998.09.24 |
申请人 |
ENERGY CONVERSION DEVICES INC. |
发明人 |
JOACHIM DOEHLER |
分类号 |
H05H1/46;C23C16/511;H01J37/32;H01L21/205;H01L21/302;H01L21/3065 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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