| 摘要 |
PROBLEM TO BE SOLVED: To provide a finely controllable actuator movable over a wide area hard to see from outside in a microscope. SOLUTION: An actuator comprises a motion part 1 composed of piezoelectric elements, drive 2 for outputting specified voltages for expanding/shrinking the piezoelectric elements, and means 3 for controlling the specified voltages such that it applies the specified voltages to the piezoelectric elements to expand/ shrink them repeatedly to move a wall surface 10 up and down. |
