发明名称 SEMICONDUCTOR TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To improve measuring efficiency and to decrease testing cost. SOLUTION: A testing-device main body 103 forms and outputs input digital signals 1-L to be imparted to the object for testing. The signals are converted into input analog signals by an input-signal converter 102 on a test heat 101. Furthermore, input-signal selectors (21/11)-(21/NL) switch channels, based on the control of a central controller 104 of the testing-device main body 103, so that the analog signals are outputted from the signals corresponding to a J-number and the arrangement of the object to be tested among output terminals 21-3L of N×L pieces. The M pieces of the output analog signals outputted from the J-pieces of the object to be tested respectively, to which the input analog signals have been inputted from input terminals 51-5M corresponding to the number and the arrangement of the objects to be tested. Output signal selectors (22/11)-(22/NM) switch the channels corresponding to the channels on the side of the testing device main body 103. Outputs signal converters (12/11)-(12/NM) convert the signal into the output digital signal and outputs the signal to the testing device main body 103.
申请公布号 JPH11111790(A) 申请公布日期 1999.04.23
申请号 JP19970266503 申请日期 1997.09.30
申请人 TOSHIBA CORP 发明人 SUZUKI KUNIHIKO
分类号 G01R31/316;G01R31/28;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/316
代理机构 代理人
主权项
地址