发明名称 PHOTOSENSITIVE PLATE PACKAGE FOR PHOTOMASK
摘要 PROBLEM TO BE SOLVED: To make it possible to cope with being made to have high quality and high fineness by using three case bodies, that is, an outer case, a middle case and an inner case each having an opening part on one side. SOLUTION: A convex cushioning material 6 is put in the inner case 3 in the outer case 1 of this plate package 11. Photosensitive plates 8 and 9 are housed with their image forming surfaces inside in a state where they keep a fixed space so as not to come into contact with each other by a pair of spacers 4 and 5 on the material 6, and the cushioning material 7 is put on the plate 9 and the middle case 2 is inserted between the cases 1 and 3 from the upper part so as to cover each other. Furthermore, the case 1 is packaged with a resin film 10 in order to prevent the infiltration of dust and the humidity from the outside. A gap between the inner surface of the case 1 and the outer surface of the case 2 is set to 1.0 to 8.0 mm in the case of adding both sides, similarly, the gap between the inner surface of the case 2 and the outer surface of the case 3 is set to 1.0 to 8.0 mm, the gap between the inner surface of the case 3 and teh spacers 4 and 5 is set to 0.0 to 8.0 mm, and the gap between the end faces of the short sides of the plates 8 and 9 and the inner surface of the case 3 is set to 1.0 to 8.0 mm.
申请公布号 JPH11109561(A) 申请公布日期 1999.04.23
申请号 JP19970272629 申请日期 1997.10.06
申请人 KONICA CORP 发明人 TAGUCHI MASAHIKO;TAMAZAWA KAZUHIDE
分类号 G03C3/00;G03F1/66 主分类号 G03C3/00
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