发明名称 PIEZOELECTRIC ELEMENT, INK JET RECORDER HEAD AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric element, ink jet recorder head and manufacture thereof which avoids cracking during manufacturing of the piezoelectric element. SOLUTION: The piezoelectric element has piezoelectric material-made piezoelectric layers 401, 402 held between an upper and lower electrodes 403, 302. The piezoelectric layer has one or more first high-density piezoelectric layers 402 having specified density and one or more second low-density piezoelectric layers 401 having a lower density than that of the first one. The second layer 401 relaxes residual stress generated during manufacturing of the high-density layer 402 and avoids cracking the piezoelectric element.
申请公布号 JPH11112048(A) 申请公布日期 1999.04.23
申请号 JP19970270245 申请日期 1997.10.02
申请人 SEIKO EPSON CORP 发明人 OKA HIROSHI;SUMI KOJI
分类号 B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/15;B41J2/16;H01L41/09;H01L41/253;H01L41/39 主分类号 B41J2/045
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