Plasma generator with microwave waveguide

摘要

The microwave waveguide (5) is coupled to a vacuum container (1) comprising a gas feeder for electron discharge and an exhauster. A dielectric part (10) in tubular or rod shape is inserted into the vacuum container, and is fitted with a microwave transmitter (9). A magnetic field generator is fitted to the outer section of the vacuum container. The microwave transmitter is in the form of a slot, or an aerial in the wall of the waveguide. The dielectric part is formed by quartz, hard glass, Teflon (RTM; PTFE), ceramics, or a combination of material, through which a microwave can penetrate.