FINE AND MICRO-MACHINING PROCESS FOR WORKPIECES BY MEANS OF LASER BEAMS

摘要

A process and device are disclosed for fine and micro-machining workpieces by means of laser beams. The process is conducted in several stages and the device has a modular design. The process and device make it possible to generate highly uniform cut joints or grooves, to set the required conicity, to work in a highly accurate and reproducible manner and give a great freedom of design during machining.