发明名称 SYSTEM FOR PLASMA IGNITION BY FAST VOLTAGE RISE
摘要 An improved system of igniting a plasma (3) can act by using a rapid voltage rise and thus cause ions (12) which may be pre-existing to create secondary electron emission or the like. In one embodiment, the voltage rise can be timed to be comparable to the transit time of the electrons across the plasma. It can also be arranged to achieve a voltage rise in less than 1000 microseconds, to result in a transition time which is less than one hundred times the transit time, to maximize the emission of secondary electrons, or even to merely result in collision energies ranging from 5 to 500 electron volts. The transition time can be controlled through an ignition control (9) which may be programmable, may involve charging output storage devices, or may involve delayed switching to supply the increased voltage to the plasma after the storage elements have been more fully charged.
申请公布号 WO9920087(A2) 申请公布日期 1999.04.22
申请号 WO1998US21534 申请日期 1998.10.13
申请人 ADVANCED ENERGY INDUSTRIES, INC.;DRUMMOND, GEOFFREY, D.;MCDONOUGH, GEORGE;SCHOLL, RICHARD, A.;KERR, TIM;HARPOLD, JOHN, G. 发明人 DRUMMOND, GEOFFREY, D.;MCDONOUGH, GEORGE;SCHOLL, RICHARD, A.;KERR, TIM;HARPOLD, JOHN, G.
分类号 H01J37/32;H05H1/46 主分类号 H01J37/32
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