| 摘要 |
<p>An electrostatic actuator and an apparatus mounted with the electrostatic actuator, which adsorbs gases generated in grooves by gettering materials to stabilize the electrostatic force and reduce the change with time. Where the electrostatic actuator is used in an inkjet head, the inkjet head comprises a plurality of independent ejection chambers (6) communicating with respective nozzle holes (4), vibration plates (5) formed at the bottoms of the ejection chambers (6) to cause mechanical deformations, electrodes (9) provided in recesses (20) parallel to the vibration plates (5) to drive the vibration plates (5), and a common ink cavity (8) to supply ink to the ejection chambers (6). Recesses (22) are formed in a substrate (3) in such a way as to communicate with the recesses (20) formed in the substrate (3) and gettering materials (30) are provided in the recesses (22).</p> |
