Position measurement device with picometer range resolution

摘要

The device has at least two crystalline components (1,2), which can be moved relative to each other, at least one component to generate interference X-rays (3) and a quantitative X-ray detector (8). The crystalline components are arranged to cause X-ray diffraction and produce interference maxima. The resulting partial beams can interfere. The relative position of the crystalline components is derived from the resulting intensity of the diffracted total beam which varies with the relative position with a period correlated with the crystalline lattice constant.