| 摘要 |
A semiconductor manufacturing system (10) includes a getter-based gas purifier (12) with a safety device coupled in flow communication with a gas distribution network (16) for a semiconductor fabrication facility. The gas distribution network (16) supplies purified gas to at least one wafer processing chamber (18a-e) in the semiconductor fabrication facility. The getter-based gas purifier (12) with a safety device includes a getter column (20) having a sacrificial getter bed (40) disposed therein. In one embodiment the getter column (20) includes a gas inlet blocking device (22) disposed therein, with the gas inlet blocking device (22) having a sacrificial getter bed (40) disposed therein. In other embodiments the getter column (20) inlcudes sacrificial getter bed (40) and a porous member (38 or 46) disposed above a primary getter bed (32) disposed within the getter column. The gas inlet blocking device preferably includes a housing (36), a sacrificial getter bed (40), and a porous metallic support (38) that supports the sacrificial getter bed (40) with the housing (36). A high melting point, nonmetallic liner (42) separates the sacrificial getter bed (40) from the housing (36). In an alternative embodiment, the gas inlet blocking device (22) includes a porours ceramic support (46) and a layer of a meltable material (48), e.g. stainless steel shot, is disposed between the sacrificial getter bed (40) and the porous ceramic support (46). A method of protecting a getter column and a method of making an integrated circuit device are also described. |
