发明名称 |
HEAT-TREATING METHOD AND RADIANT HEATING DEVICE |
摘要 |
There is provided a heat-treating method and a radiant heating device by which an object to be heat-treated can be heat-treated at an actually desired temperature regardless of the dopant concentration or resistivity of the object at the time of heat-treating the object with a radiant heating device using a radiation thermometer as a temperature detector. In the method, the object is heat-treated at an actually desired temperature by correcting the temperature of the object in accordance with the dopant concentration or resistivity of the object. In the apparatus, the dopant concentration or resistivity of the object is inputted in advance to a temperature controller and the controller calculates an actual temperature of the object by correcting and computing the temperature of the object detected with the radiation thermometer in accordance with the dopant concentration or resistivity of the object and controls the temperature of the object based on the calculated temperature value. <IMAGE> |
申请公布号 |
EP0910115(A1) |
申请公布日期 |
1999.04.21 |
申请号 |
EP19970905470 |
申请日期 |
1997.03.10 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
TATE, NAOTO;SAKAI, TOMOYUKI;TODA, NAOHISA;HABUKA, HITOSHI |
分类号 |
G01K13/00;C30B29/06;C30B31/18;G01J5/00;G01J5/02;H01L21/00;H01L21/205;H01L21/22;H01L21/26;H01L21/265;H01L21/324;H01L21/66 |
主分类号 |
G01K13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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