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发明名称
ION BEAM SPUTTERING DEVICE
摘要
申请公布号
JPH11106915(A)
申请公布日期
1999.04.20
申请号
JP19970270994
申请日期
1997.10.03
申请人
JAPAN AVIATION ELECTRON IND LTD
发明人
KITAJIMA NAOYA
分类号
C23C14/34;C23C14/46;(IPC1-7):C23C14/46
主分类号
C23C14/34
代理机构
代理人
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