| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device for optical parts capable of surely removing the contaminants on the surfaces of the optical parts without unequalness. SOLUTION: This washing device is constituted to wash the surfaces of the optical parts 2 of arbitrary shapes by irradiating the optical parts 2 with UV rays. A UV light source 4 which emits the UV rays is constituted to be movable by an arm part 5. The operation control of the arm part 5 is so executed by a controller 6 that the spacing between the optical parts 2 and the UV light source 4 is held at a prescribed distance and that the UV light source 4 is moved along the external shape of the optical parts 2. |
