| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent scoring of substrate surfaces and stably contain the substrates by providing a recess holding the substrate laid flat and forming a step at the side face of the inside wall and projections having a curved face at the rear face respectively. SOLUTION: A tray 10 is provided with a circular recess 11 in plan view, for containing a substrate. A circumferential step 12 is formed at the side face of the inside wall of the recess 11 and about three projections 13 having a curved face are formed to protrude downward at the rear face. And about two vertival grooves are formed at the outer peripheral part of the recess 11. The front surface 22 of the substrate 20 is turned down and the slope face 21 for preventing etching of the outer peripheral face is disposed to contact the step 12 and the substrate is contained flatly. In this case, a jig holding the side face of the substrate 20 can be easily taken in/out owing to a vertical grooves formed at the outer peripheral part of the recess 11. When the tray 10' is stacked, the projections 13 are brought into contact with the rear face 23 of the substrate 20 in the tray 10. The substrate surface can be protectively packed by mounting a reinforcing plate on the stacked trays 10, 10'.</p> |
