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发明名称
THIN FILM FORMING DEVICE AND FORMATION OF COMPOUND THIN FILM USING IT
摘要
申请公布号
JPH11106911(A)
申请公布日期
1999.04.20
申请号
JP19970275906
申请日期
1997.10.08
申请人
CANON INC
发明人
SONE KAZUHO
分类号
C23C14/34;C23C14/54;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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