| 发明名称 |
Cleaning a potassium contaminated surface with pure hot water |
| 摘要 |
<p>A treating method can effectively and efficiently remove alkali metals including potassium. It cleans an object brought into contact with a potassium-containing treatment agent by holding the object in contact with pure water heated to or above 80 DEG C. <IMAGE></p> |
| 申请公布号 |
EP0910116(A2) |
申请公布日期 |
1999.04.21 |
| 申请号 |
EP19980119552 |
申请日期 |
1998.10.16 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TADAHIRO, OHMI;MATSUOMI, NISHIMURA;TAKAYUKI, JIZAIMARU |
| 分类号 |
H01L21/304;B08B3/08;H01L21/306;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/304 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
