| 摘要 |
<p>PROBLEM TO BE SOLVED: To automatically calculate a fuse interval and a fuse line interval and to control the interval of plural laser beams by providing a data control part transmitting the coordinate of machining points to a control part according to a coordinate data file of a previously inputted machining objective group and positional information being as the basis of the positional coordinate of the machining points. SOLUTION: The data control part 15 in which the positional coordinate data file of a fuse and the positional information of the fuse to be cut off on a wafer 7 are previously inputted, calculates the positional coordinate of the fuse to be cut off by overlapping the positional coordinate data file of the fuse and the positional information of the fuse to be cut off and this calculated value is transmitted to a control part 9. Further, the data control part 15 calculates a fuse interval distance from the positional coordinate data file and transits to the control part 9. The control part 9 moves and controls the position of a laser beam source so that an interval in each of the laser beams irradiated to the wafer 7 becomes this interval distance and a stage 8 is moved to the position of the fuse to be cut off.</p> |
