| 摘要 |
PROBLEM TO BE SOLVED: To automatize an operation for charging a quartz crucible with polycrystal silicon as a raw material, to speed up the operation and to prevent the damage of the quartz crucible during the charge of the raw material. SOLUTION: The inner wall of the side of a container 3 having an inner diameter equal to or smaller than that of a quartz crucible 10 is covered with a protecting film. A fixed amount of polycrystal silicon is thrown from a raw material feeder 6 into the container, is cleaned by pouring pure water and frozen together with the pure water. The polycrystal silicon is suspended, the protecting film is released and the polycrystal silicon is loaded in the quartz crucible 10. The frozen pure water is melted and the polycrystal silicon and the quartz crucible 10 are dried. These operations are carried out on a conveyor 1. |
