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发明名称
VAPORIZER
摘要
申请公布号
JPH11106922(A)
申请公布日期
1999.04.20
申请号
JP19970289071
申请日期
1997.10.06
申请人
KOKUSAI ELECTRIC CO LTD
发明人
NAKAMURA NAOTO
分类号
C23C16/44;C23C16/448;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C16/44
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代理人
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