发明名称 |
Methods and systems for delivering an ultra-pure gas to a point of use |
摘要 |
Methods and systems of delivering ultra-high purity gas to a point of use are claimed and described. The methods include providing a source of ultra-high purity liquid (the source preferably at a pressure and temperature sufficient to maintain the liquid in substantially the liquid phase); transporting (preferably via pressure in the source alone) the ultra-high purity liquid from the source to one or more means to effect a phase change of the ultra-high purity liquid to an ultra-high purity gas; effecting a phase change (preferably at or near equilibrium vaporization conditions) of the ultra-high purity liquid to form an ultra-high purity gas in the one or more means to effect the phase change; and routing the ultra-high purity gas from the means to effect the phase change to a point of use (preferably with no intermediate, potentially impurity-generating media between the means to effect the phase change and the point of use other than ultra-clean conduit). |
申请公布号 |
US5894742(A) |
申请公布日期 |
1999.04.20 |
申请号 |
US19970931639 |
申请日期 |
1997.09.16 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET, L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
FRIEDT, JEAN-MARIE |
分类号 |
B01J4/00;F17C7/04;H01L21/205;(IPC1-7):F17C9/02 |
主分类号 |
B01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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