| 摘要 |
PROBLEM TO BE SOLVED: To manifest better dielectric characteristics, further reduce a leak current which has hitherto been a problem and prevent a soft error from occurring in a target material for sputtering comprising a perovskite type compound oxide represented by Bax Sr1-x TiO3-y . SOLUTION: This target material for sputtering has <=1 ppm content of respective elements of the group of Na, K, Mg, Fe, Ni, Co, Cr, Cu and Al and $1 ppb content of the respective elements of U and Th in the target material for the sputtering comprising a perovskite type compound oxide represented by the formula Bax Sr1-x TiO3-y [0<=(x)<1 and 0<=(y)<0.5]. |
