POLISHING DEVICE, POLISHING JIG USED THEREFOR AND POLISHED PART INSTALLATION MEMBER INSTALLED ON THIS POLISHING JIG

摘要

PROBLEM TO BE SOLVED: To provide a compact and simple polishing device by which a polished part and polishing surface plate are hard to be damaged and a favorable state of a polished surface is obtained, even if an uneven part is existed on the polishing surface plate. SOLUTION: At least one polishing jig 21 mounted a polished part is arranged on a rotated polishing surface plate 11 and a polishing head 30 turnable in one direction on the polishing surface plate 11 is installed on this polishing jig 21 and the polished part as well as two dummy polished parts at minimum for constituting the polished surface are installed on this polishing head 30 and the detection means of a residual polishing amount is provided on the polished part. A polish correction means for correcting the polishing state of the polished part is provided on the polishing head 30. A polishing device 20 is constituted so that the detection signal of the residual polishing amount of the polished part and the correction signal to the polish correction means from a rotated polishing head 30 can be exchanged with a control device 18 through a slip ring 25. As the polished part is polished while being rotated on the polishing surface plate 11, the favorable state of a polished surface is obtained.