| 摘要 |
PROBLEM TO BE SOLVED: To enable the prevention of cracking or peeling by alternately laminating tapes of ceramics comprising materials different in physical properties, forming the laminate, continuously measuring the shrinkage rate of the laminate in specific directions intersecting at right angles during a sintering step and controlling the heat-up rate corresponding to the shrinkage rate. SOLUTION: A ceramic alternate laminate 1 prepared by alternately laminating ceramic tapes comprising materials different in physical properties is placed on a pedestal in a sintering apparatus and fixed not to move two lateral faces intersecting at right angles (the lateral face on the left side and the lateral face on the back side) and three contact rods 2a, 2b and 2c are respectively brought from the outside of a furnace into contact with two lateral faces (the lateral face on the face side and the lateral face on the right side) and the top surface of the laminate 1. The three contact rods 2a, 2b and 2c are connected to displacement gauges for the three axes to measure the movement of the contact rods 2a, 2b and 2c in the X-, Y- and Z- directions with the displacement gauges. The shrinking behavior of the laminate 1 during the sintering is monitored with the measured values and the heat-up rate of the sintering furnace is controlled corresponding to the shrinkage rate of the laminate 1. Thereby, a sintered compact without cracking is obtained. |
