Fused silica lens, microlithography system including a fused silica lens and method of making a fused silica lens

摘要

A method of producing a fused silica glass by thermally converting a polymethylsiloxane precursor, the lens transmitting ultraviolet radiation at wavelengths below 300 nm. without undergoing a marked absorption transition, the lens so produced, and a microlithography system employing a lens of such glass.