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发明名称
摘要
申请公布号	JP2594172(Y2)	申请公布日期	1999.04.19
申请号	JP19930073325U	申请日期	1993.12.24
申请人		发明人
分类号	H01L21/60;H01L21/321;H01L23/00;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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