GAS EXHAUSTING APPARATUS OF ION IMPLANTING SYSTEM,申请号KR19950042897-传众专利搜索

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发明名称	GAS EXHAUSTING APPARATUS OF ION IMPLANTING SYSTEM
摘要
申请公布号	KR0187373(B1)	申请公布日期	1999.04.15
申请号	KR19950042897	申请日期	1995.11.22
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	OH, YONG-SUB;BAE, SUNG-DONG;SHIN, DONG-JIN;SONG, WOO-CHOL
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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