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经营范围
发明名称
APPARATUS FOR CLEANING SUBSTRATE
摘要
申请公布号
KR0187014(B1)
申请公布日期
1999.04.15
申请号
KR19960000615
申请日期
1996.01.15
申请人
LG ELECTRONICS CORP.
发明人
PARK, MIN-HO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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