发明名称 Measurement of optical parameters of crystalline samples using reflected light
摘要 The polarization state of the beam reflected by the crystalline surface of the sample (P), is altered. It is analyzed using a beam-splitter and plane- or focusing mirrors (S1, S2, S3). The beam splitter transmits a fraction of incident light exhibiting linear polarization in the required direction for measurement. The reflected fraction of the beam has differing polarization. The apparatus includes analyzers processing data simultaneously from the separated beams, which determine the RAS parameters from the fraction reflected by the splitter, and the reflectivity parameters from the fraction transmitted by the splitter. Preferred Features: The splitter is a beam-splitting polarization prism (P2). To measure polarization-dependent optical parameters of beams reflected by static crystalline samples, the apparatus includes in addition, a photoelastic modulator (PEM). The analysis unit processes data to determine real and imaginary parts of RAS spectra includes a plane mirror, spherical mirror, monochromator, detector and lock-in amplifier tuned to the PEM-modulation. The plane and spherical mirrors focus the transmitted split beam onto the monochromator and the light leaving is intercepted by detectors. The lock-in technique analyses real and imaginary parts of RAS spectra. Apparatus used, and a variant are further detailed.
申请公布号 DE19745607(A1) 申请公布日期 1999.04.15
申请号 DE19971045607 申请日期 1997.10.06
申请人 FORSCHUNGSVERBUND BERLIN E.V., 12489 BERLIN, DE 发明人 HABERLAND, KOLJA, 13403 BERLIN, DE;ZETTLER, JOERG-THOMAS, DIPL.-PHYS. DR., 13187 BERLIN, DE
分类号 G01J4/00;G01N21/21;(IPC1-7):G01J3/447;C30B25/16;G01N21/55;G02B27/28 主分类号 G01J4/00
代理机构 代理人
主权项
地址