FORMING METHOD OF ALIGNMENT KEY FOR RECOGNIZING PATTERN,申请号KR19960008517-传众专利搜索

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发明名称	FORMING METHOD OF ALIGNMENT KEY FOR RECOGNIZING PATTERN
摘要
申请公布号	KR0179229(B1)	申请公布日期	1999.04.15
申请号	KR19960008517	申请日期	1996.03.27
申请人	KOREA ELECTRONICS CO.,LTD	发明人	LEE, JUNG-HWAN;UM, SOON-YONG;LEE, PIL-SOO;KIM, JOO-YEUN
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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