ELECTRODE STRUCTURE OF ETCHING APPARATUS,申请号KR19950044878-传众专利搜索

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发明名称	ELECTRODE STRUCTURE OF ETCHING APPARATUS
摘要
申请公布号	KR0179862(B1)	申请公布日期	1999.04.15
申请号	KR19950044878	申请日期	1995.11.29
申请人	HYUNDAI MICRO ELECTRONICS CO.,LTD.	发明人	PARK, JIN-HAN
分类号	H01L21/302;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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