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发明名称
COLLIMATOR OF SPUTTERING APPARATUS
摘要
申请公布号
KR0179775(B1)
申请公布日期
1999.04.15
申请号
KR19950049205
申请日期
1995.12.13
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
NA, KWAN-KOO
分类号
H01L21/203;(IPC1-7):H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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