EXHAUSTING SYSTEM OF CHEMICAL VAPOUR DEPOSITION EQUIPMENT,申请号KR19950034995-传众专利搜索

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发明名称	EXHAUSTING SYSTEM OF CHEMICAL VAPOUR DEPOSITION EQUIPMENT
摘要
申请公布号	KR0181904(B1)	申请公布日期	1999.04.15
申请号	KR19950034995	申请日期	1995.10.11
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HONG, SUNG-HYUN;KIM, JONG-BOK;JI, YONG-BAE;KANG, HONG-DAE
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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