SEMICONDUCTOR WAFER DIAGNOSIS EQUIPMENT,申请号KR19960022653-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER DIAGNOSIS EQUIPMENT
摘要
申请公布号	KR0181909(B1)	申请公布日期	1999.04.15
申请号	KR19960022653	申请日期	1996.06.20
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JON, SANG-YOUNG;PARK, JONG-CHOL
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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