摘要 |
PROBLEM TO BE SOLVED: To produce a tin oxide gas sensor having resistance increased by the concn. of at least one kind of gas to be measured at measuring temp., by baking tin oxide in air to change the physical state thereof. SOLUTION: Capability of a sensor can be controlled so that the sensor is obtained so as to have widely different characteristics at different operation temps. by preliminarily baking tin oxide in the sensor. The sensor is formed by baking tin oxide in air at temp. exceeding about 1400 deg.C. The baking of tin oxide at this temp. is considered to change non-stoichiometric properties of tin oxide or to exert effect on the physical flocculation state of tin oxide in the case of other means so as to exert effect on the surfaces of tin oxide particles. A method for producing a tin oxide gas sensor having resistance increasing corresponding to an increase in the concn. of at least one gas to be measured at measuring temp. is obtained. |