| 摘要 |
PROBLEM TO BE SOLVED: To suppress vibrations at the time of stopping by determining the characteristic vibration waveform of a uniaxial table, storing thus determined characteristic vibration waveform in a memory section and setting a speed pattern, such that the deceleration time of the speed pattern of uniaxial table is synchronized with the plus time of the characteristic vibration waveform for canceling the characteristic vibration power and the deceleration power each other. SOLUTION: Uniaxial tables 11, 12 generate characterostic vibrations depending on the components, assembling specifications, or the like. The characterostic vibration imparts vibrations to the uniaxial table 11, 12 and the vibration mode is measured by means of a laser unit and registered in a characteristic vibration waveform memory section. Positive and negative vibrations are repeated. When the deceleration time is synchronized with the positive time of characteristic vibration waveform, the uniaxial table 11, 12 suppress vibrations at the time of stopping movement of a board 15 for mounting an electronic component precisely on the board 15. The uniaxial tables 11, 12 set a speed pattern, such that the deceleration time thereof is synchronized with the plus time of characteristic vibration waveform. |
