| 摘要 |
<p>PROBLEM TO BE SOLVED: To avoid floating of a wafer from a table during rotation to easily and surely support the wafer by providing a presser for pressing the top face of the wafer toward the table with rotation of the table by a rotary mechanism. SOLUTION: As treating of a wafer W begins, a drive motor rotates the wafer-supporting turntable 30a mounting a wafer at a high speed with a pendulum 33b shifting in a direction a due to a centrifugal force. A pressing claw 33c of a presser 33 attached to the table 30a swings to press the top face of the wafer W to the table 30a enough to avoid floating the wafer or deviating its position, thus easily and surely supporting the wafer W with the table 30a.</p> |
