METHOD FOR MANUFACTURING SOI SUBSTRATE,申请号JP19970252231-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SOI SUBSTRATE
摘要
申请公布号	JPH1197320(A)	申请公布日期	1999.04.09
申请号	JP19970252231	申请日期	1997.09.17
申请人	NEC CORP	发明人	KOBAYASHI KIYONARI
分类号	H01L21/762;H01L21/02;H01L27/12;(IPC1-7):H01L21/02	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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