| 摘要 |
PROBLEM TO BE SOLVED: To enable real time measurement and the measurement of a rapid change phenomenon by increasing the measuring speed of a position screen by using the light irradiation of a sensor wherein a plurality of short strip like sensors are arranged parallel and that of a plurality of LED arrays arranged in the direction crossing a sensor arranging direction at a right angle to light at the same time. SOLUTION: A sensor array 2 is constituted of short strip like sensors 6 responding to hydrogen ions of an Si epitaxial grown film formed on the upper surface of a semiconductor substrate 5 in a plurality of rows and an irradiation part 3. Since signals of two measuring points 10 can be once taken out in a measuring apparatus, a measuring time becomes half. Since the signals of arrays of odd-number and even- number lines are respectively taken out by signal taking-out and processing parts 15, 16, and signal processing circuits are provided in signal taking-out and processing by n/2, the number of signals capable of being once taken out of arrays of (N) lines becomes N. As a result, time shortening effect becomes large as the number N of signals increases. By this constitution, the measuring speed of a screen becomes rapid and a high speed change phenomenon and a minute region can be measured. |
