| 摘要 |
PROBLEM TO BE SOLVED: To acquire correct measured information at all times by adjusting a position of a displacement sensor to project a light of a light-emitting element to a constant position of a cantilever with a constant angle of incidence. SOLUTION: A scanner 28 has a moving end which can move in three- dimensional directions upon application of an electric signal, and optically detects a displacement state of a cantilever 30 set at the moving end by displacement sensor. The displacement sensor has a light-emitting element 32 illuminating a predetermined light to the cantilever 30 and a light-detecting element 34 detecting a reflecting light, and is arranged in a sensor holder 44 having a built-in position adjustment mechanism. The position adjustment mechanism adjusts a position of the displacement sensor to illuminate the light of the light- emitting element 32 to a constant position of the cantilever 30 with a constant angle of incidence at all times during a movement of the moving end of the scanner 28. While a bend state of the cantilever 30 is maintained constant, a probe 40 of the cantilever 30 is scanned to trace a sample 48 in XY directions, thereby measuring a surface state of the sample 48. Accordingly correct measured information is obtained at all times. |
