| 摘要 |
PROBLEM TO BE SOLVED: To enable high-magnification optical observation by setting a guide optical system which can guide an observation illumination light to an inner space of a scanner and a projection optical system which can project the guided illumination light to a measured object. SOLUTION: Since the need of notching part of a scanner 40 for the purpose of optical microscopic observation is eliminated in this measuring apparatus, an optical microscope and a scanning type probe microscope can be combined with maintaining various performances of the scanner 40. Moreover, since a ring collimator lens 54 is arranged in the vicinity of a move end of the scanner 40, an observation area, namely, an optical path length to a sample 34 is reduced, so that a range of an observation illumination light can be set large. Accordingly a quantity of light taken via an objective lens 58 is increased, thereby enabling stable and sure optical observation with high magnification. For instance, with the application of a transillumination to a low-contrast sample such as a live cell, etc., an optimum illumination method to various microscopies and a magnification of the objective lens 58, etc., is obtained.
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