METHOD FOR INSPECTING LCD SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To enable the inspection of a substrate having no gate control terminals and the exact inspection of pixel defects by using the charges charged into the auxiliary capacitors of all pixels as discharge currents to an IV converter and successively measuring the peak values thereof. SOLUTION: The charges charged by the prescribed high voltage to the auxiliary capacitors of the prescribed pixels scanned through video terminals 23 are subjected to IV conversion and the peak values of the discharge currents are successively measured. The pixel defects relating to the respective pixels as well as the defects relating to X-Y scanning lines are decided. The measurement is executed by applying the set ring time capable of sufficiently discharging the charges of the auxiliary capacitors. Data lines and gate lines for pixel scanning are sequentially scanned at a desired low-speed clock and the discharge currents from the video terminals 23 are converted to voltage signals by the IV converter 42 of an IV conversion circuit 43. Peak voltages are held by an S and H circuit 34 and are subjected to prescribed amplification by an amplifier 35. The voltages are then subjected to AD conversion by a converter 36 and are successively stored into a buffer memory 38. Decision processing is executed by an image processing section 37 after the completion of the measurement.