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经营范围
发明名称
PARTICLE BEAM DEVICE
摘要
申请公布号
JPH1196957(A)
申请公布日期
1999.04.09
申请号
JP19980210751
申请日期
1998.07.27
申请人
LEO ELEKTRONENMIKROSKOPIE GMBH
发明人
OIGEN BUAIMAA
分类号
H01J37/248;H01J37/04;H01J37/28;(IPC1-7):H01J37/248
主分类号
H01J37/248
代理机构
代理人
主权项
地址
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