| 摘要 |
PROBLEM TO BE SOLVED: To bring spacer into contact with protrusions and to prevent the spacer from contacting with the surface of an electron source, then to prevent breaking and deterioration of electron emission elements in the time of assembling, by forming the protrusions on the substrate so that the height of the protrusions measured from the surface of the electron emission part is set larger than that of the microscopic irregularity of the surface of the spacer, before assembling the substrate, the spacer and the face plate. SOLUTION: Protrusions 62 made of an insulator are formed on the substrate 14, then a thin film electron source composed of lower electrodes 13 and protective layers 15 is formed. A face plate 110 is prepared with a black matrix 120 and a metal back 122. The height h of the protrusions 62 measured from the surface of the thin film electron source is set larger than the heightΔz of microscopic irregularity of spacer 60. Then, the face plate 110, the substrate 14 and the spacer 60 are sealed. Thus, the face plate 110, the substrate 14 and the spacer 60 can be easily assembled without deterioration or breaking of the thin film electron source, then device of an electron beam excitation type flat surface display device with a big screen can be manufactured with a high yield ratio.
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