| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a dielectric substance having a thin film thickness and a large specific inductive capacity. SOLUTION: A paste-like mixture 3 prepared by mixing BaTiO3 powder in a photosensitive epoxy resin solution is printed on a lower electrode 2 on the surface of a substrate 1 (a). The film thickness of the printed mixture 3 is adjusted to, for example, about 50μm. Then a deposited layer 3a is formed by depositing the BaTiO3 powder on the surface of the lower electrode 2, by holding the mixture 3 for about one hour at a room temperature. After the deposited layer 3a has been formed, a resin layer 3b is formed on the layer 3a. Then the mixture 3 is dried by heating the mixture at about 80 deg.C for about 30 minutes (b). After the mixture 3 has been dried, the epoxy resin of the resin layer 3b is irradiated with ultrasonic rays emitted from the resin layer 3b side (the epoxy resin in the deposited layer 3a is not exposed due to the BaTiO3 powder) and the exposed resin layer 3b is developed and removed. Thereafter, the deposited layer 3a which becomes the dielectric substance 4 of a capacitor is hardened by heating the layer 3a at about 150 deg.C for about 30 minutes (c and d).
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