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发明名称
VERTICAL HEAT-TREATING DEVICE
摘要
申请公布号
JPH1197360(A)
申请公布日期
1999.04.09
申请号
JP19970275255
申请日期
1997.09.22
申请人
TOKYO ELECTRON LTD
发明人
SHIMAZU TOMOHISA
分类号
H01L21/22;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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