发明名称 CARRYING DEVICE AND CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To hold and carry an object in a state of exposing the surface of the object as much as possible without damaging the object. SOLUTION: A holder 24 is fixed to an attaching part provided on the upper end part of the respective roller links of a chain and the movable part of the holder 24 is constituted so as to be movable in a direction orthogonal to a carrying direction. Three notched parts 48 are provided on the end part of a holding part 34 provided on an opposite direction inner side in the movable part and a groove part 49 is formed on a part excluding the notched parts 48. A chip 22 is held in a state where both ends of the chip 22 are positioned inside the groove part 49. In this case, the part positioned inside the notched parts 48 of both ends of the chip 22 is exposed to the outside. Thus, when the chip is carried inside the respective tanks of this cleaning device and cleaning water is jetted, the cleaning water reaches even the ends of the chip 22.
申请公布号 JPH1197504(A) 申请公布日期 1999.04.09
申请号 JP19970253352 申请日期 1997.09.18
申请人 TOHO TECHNOLOGY CORP 发明人 KOJIMA TERUMOTO;ITO KAZUKI
分类号 H01L21/677;H01L21/304;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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