| 摘要 |
PROBLEM TO BE SOLVED: To prevent the unnecessary motions of a movable table when power supply is turned on/off. SOLUTION: A table driving device is provided with a motor which gives a driving force to a movable table, a current amplifier 11 which supplies the electric current corresponding to a command to a coil 13 of the motor, and a voltage source for actuating the amplifier 11. In this case, a switch 2 which opens or closes in accordance with the power supply state to the voltage source is connected between the coil 13 and the amplifier 11. |
