| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture optical parts with desired spectral characteristics without generation of a color center by providing a film containing oxygen, fluorine and a metallic atom, between a base and a film. SOLUTION: Lenses SA1, SA2 serving as optical parts are composed of base substances with fluorite as a main component, that is, calcium fluoride (CaF2 ) base substances 100, undercoat films 101, antireflection films 102, 103, low refractive index films 102L and high refractive index films 102H, that is, the undercoat film 101 is provided as a film to come in contact with the surface of the calcium fluoride base substance 100 so as to reduce the damage to the calcium fluoride base substance 100 caused by direct exposure to electrons, ion or plasma containing electrons at the time of forming the film 102 thereon. In addition, adhesion between the calcium fluoride base substance 100 and the film 102 is improved so as to reduce interface reactions between the calcium fluoride base substance 100 and the film 102. |
