| 摘要 |
PROBLEM TO BE SOLVED: To thin a back-up mechanism, raise the position of a stage whereon a pellet to be picked up is mounted, and reduce the carrying distance of a picked-up pellet, by moving a back-up head of a back-up mechanism vertically by a diaphragm cylinder. SOLUTION: A diaphragm cylinder 264 is fixed and arranged inside a cavity of an adapter plate 224 below a back-up head 234. A shaft 264a of the cylinder 264 moves up and down according to activation/nonactivation of supplying operation of high pressure air to a high pressure air supply opening 264b. A lower surface of the head 234 is pressed to the shaft 264a by a spring, and the cylinder 264 pushes up the head 234 against a spring on receiving supply of high pressure air. As a result, it is possible to thin a back up mechanism, to raise a position of a table whereon a pellet is mounted, and to assemble a pellet rapidly even if a back-up mechanism which moves up and down is required. |
